Isao Kawata

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Sayama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Micropattern shape measuring system and method
- Patent number 7,130,063
- Issue date Oct 31, 2006
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional micropattern profile measuring system and method
- Patent number 7,038,767
- Issue date May 2, 2006
- Hitachi High-Technologies Corporation
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Grant
Micropattern shape measuring system and method
- Patent number 6,894,790
- Issue date May 17, 2005
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Micropattern shape measuring system and method
- Publication number 20050182595
- Publication date Aug 18, 2005
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Three-dimensional micropattern profile measuring system and method
- Publication number 20030090651
- Publication date May 15, 2003
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Application
Micropattern shape measuring system and method
- Publication number 20030090684
- Publication date May 15, 2003
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS