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Isao MORI
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
11,978,612
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,424,105
Issue date
Aug 23, 2022
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,094,512
Issue date
Aug 17, 2021
HITACHI HIGH-TECH CORPORATION
Kazuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,699,884
Issue date
Jun 30, 2020
HITACHI HIGH-TECH CORPORATION
Kazuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240331974
Publication date
Oct 3, 2024
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230058692
Publication date
Feb 23, 2023
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210043424
Publication date
Feb 11, 2021
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20200279719
Publication date
Sep 3, 2020
HITACHI HIGH-TECH CORPORATION
Kazuya YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190088452
Publication date
Mar 21, 2019
Hitachi High-Technologies Corporation
Kazuya YAMADA
H01 - BASIC ELECTRIC ELEMENTS