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Isao OKAZAKI
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TOKYO, JP
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last 30 patents
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Patent Grant
Probe apparatus and probe method
Patent number
10,310,010
Issue date
Jun 4, 2019
Tokyo Electron Limited
Muneaki Tamura
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
PROBE APPARATUS AND PROBE METHOD
Publication number
20160161553
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Muneaki TAMURA
G01 - MEASURING TESTING