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Film-forming apparatus
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Patent number 9,777,376
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Issue date Oct 3, 2017
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Ulvac, Inc.
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Yixin Yang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 9,109,284
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Issue date Aug 18, 2015
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ULVAC, Inc.
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Takayoshi Hirono
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Take-up vacuum processing apparatus
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Patent number 8,673,078
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Issue date Mar 18, 2014
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ULVAC, Inc.
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Takayoshi Hirono
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film-forming apparatus
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Patent number D697541
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Issue date Jan 14, 2014
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ULVAC, Inc.
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Shinya Fujimoto
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D15 - Machines not elsewhere specified
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Film-forming apparatus
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Patent number D689534
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Issue date Sep 10, 2013
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Ulvac, Inc.
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Shinya Fujimoto
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D15 - Machines not elsewhere specified
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Winding type plasma CVD apparatus
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Patent number 7,896,968
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Issue date Mar 1, 2011
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ULVAC, Inc.
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Takayoshi Hirono
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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