Isao TAFUSA

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Taiwa-cho, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 9,613,824
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing unit and thermal processing method
- Patent number 6,444,262
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Masayuki Kitamura
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD
- Publication number 20160336191
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Yusuke SAITOH
- H01 - BASIC ELECTRIC ELEMENTS