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Isao Tsukagoshi
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Nirasaki-city, JP
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last 30 patents
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Patent Grant
Method of manufacturing trench structure for device
Patent number
7,176,142
Issue date
Feb 13, 2007
Tokyo Electron Limited
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of manufacturing trench structure for device
Publication number
20070148985
Publication date
Jun 28, 2007
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method of manufacturing trench structure for device
Publication number
20040002214
Publication date
Jan 1, 2004
Nobutaka Mizutani
H01 - BASIC ELECTRIC ELEMENTS