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Ishtak Karim
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Portland, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Line bending control for memory applications
Patent number
11,864,372
Issue date
Jan 2, 2024
Lam Research Corporation
Gorun Butail
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
11,651,963
Issue date
May 16, 2023
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,180,850
Issue date
Nov 23, 2021
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
10,978,302
Issue date
Apr 13, 2021
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Minimization of carbon loss in ALD SiO2 deposition on hardmask films
Patent number
10,692,717
Issue date
Jun 23, 2020
Lam Research Corporation
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective atomic layer deposition with post-dose treatment
Patent number
10,679,848
Issue date
Jun 9, 2020
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conical wafer centering and holding device for semiconductor proces...
Patent number
10,655,224
Issue date
May 19, 2020
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Planar substrate edge contact with open volume equalization pathway...
Patent number
10,622,243
Issue date
Apr 14, 2020
Patrick Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Minimization of carbon loss in ALD SiO2 deposition on hardmask films
Patent number
10,340,136
Issue date
Jul 2, 2019
Lam Research Corporation
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead curtain gas method and system for film profile modulation
Patent number
10,202,691
Issue date
Feb 12, 2019
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for detection of plasma instability by electric...
Patent number
10,128,160
Issue date
Nov 13, 2018
Lam Research Corporation
Yukinori Sakiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
10,094,018
Issue date
Oct 9, 2018
Lam Research Corporation
Purushottam Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High dry etch rate materials for semiconductor patterning applications
Patent number
10,074,543
Issue date
Sep 11, 2018
Lam Research Corporation
Arpan Mahorowala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective atomic layer deposition with post-dose treatment
Patent number
10,062,563
Issue date
Aug 28, 2018
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective atomic layer deposition for gapfill using sacrificial und...
Patent number
10,037,884
Issue date
Jul 31, 2018
Lam Research Corporation
Fung Suong Ou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for frequency modulation of radiofrequency powe...
Patent number
9,997,422
Issue date
Jun 12, 2018
Lam Research Corporation
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
Patent number
9,941,113
Issue date
Apr 10, 2018
Lam Research Corporation
Douglas Keil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Variable temperature hardware and methods for reduction of wafer ba...
Patent number
9,870,917
Issue date
Jan 16, 2018
Lam Research Corporation
Hu Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for detection of plasma instability by electric...
Patent number
9,824,941
Issue date
Nov 21, 2017
Lam Research Corporation
Yukinori Sakiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead curtain gas method and system for film profile modulation
Patent number
9,738,977
Issue date
Aug 22, 2017
Lam Research Corporation
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
Patent number
9,644,271
Issue date
May 9, 2017
Lam Research Corporation
Douglas Keil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to tune TiOx stoichiometry using atomic layer deposited Ti f...
Patent number
9,478,411
Issue date
Oct 25, 2016
Lam Research Corporation
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus to deposit pure titanium thin film at low temp...
Patent number
9,478,438
Issue date
Oct 25, 2016
Lam Research Corporation
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetic lensing to improve deposition uniformity in a physical vap...
Patent number
8,343,318
Issue date
Jan 1, 2013
Novellus Systems Inc.
Karl Leeser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
LINE BENDING CONTROL FOR MEMORY APPLICATIONS
Publication number
20240172413
Publication date
May 23, 2024
LAM RESEARCH CORPORATION
Gorun BUTAIL
Information
Patent Application
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...
Publication number
20220154336
Publication date
May 19, 2022
LAM RESEARCH CORPORATION
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
Publication number
20220033967
Publication date
Feb 3, 2022
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LINE BENDING CONTROL FOR MEMORY APPLICATIONS
Publication number
20220028864
Publication date
Jan 27, 2022
LAM RESEARCH CORPORATION
Gorun BUTAIL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY...
Publication number
20210202250
Publication date
Jul 1, 2021
LAM RESEARCH CORPORATION
Ishtak KARIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
Publication number
20210013080
Publication date
Jan 14, 2021
LAM RESEARCH CORPORATION
Patrick G. Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
Publication number
20200227304
Publication date
Jul 16, 2020
LAM RESEARCH CORPORATION
Patrick Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Minimization of Carbon Loss in ALD SiO2 Deposition on Hardmask Films
Publication number
20200027718
Publication date
Jan 23, 2020
LAM RESEARCH CORPORATION
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY...
Publication number
20190164757
Publication date
May 30, 2019
LAM RESEARCH CORPORATION
Ishtak KARIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
Publication number
20190024233
Publication date
Jan 24, 2019
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT
Publication number
20180323057
Publication date
Nov 8, 2018
LAM RESEARCH CORPORATION
Purushottam Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONICAL WAFER CENTERING AND HOLDING DEVICE FOR SEMICONDUCTOR PROCES...
Publication number
20180171473
Publication date
Jun 21, 2018
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
Publication number
20180076100
Publication date
Mar 15, 2018
LAM RESEARCH CORPORATION
Yukinori Sakiyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION FOR GAPFILL USING SACRIFICIAL UND...
Publication number
20180061628
Publication date
Mar 1, 2018
LAM RESEARCH CORPORATION
Fung Suong Ou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH DRY ETCH RATE MATERIALS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
Publication number
20180061650
Publication date
Mar 1, 2018
LAM RESEARCH CORPORATION
Arpan Mahorowala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT
Publication number
20180005814
Publication date
Jan 4, 2018
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD CURTAIN GAS METHOD AND SYSTEM FOR FILM PROFILE MODULATION
Publication number
20170362713
Publication date
Dec 21, 2017
LAM RESEARCH CORPORATION
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
Publication number
20170362705
Publication date
Dec 21, 2017
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems and Methods for Using Electrical Asymmetry Effect to Contro...
Publication number
20170330744
Publication date
Nov 16, 2017
LAM RESEARCH CORPORATION
Douglas Keil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...
Publication number
20170314129
Publication date
Nov 2, 2017
LAM RESEARCH CORPORATION
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BA...
Publication number
20170178898
Publication date
Jun 22, 2017
LAM RESEARCH CORPORATION
Hu Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
Publication number
20170141000
Publication date
May 18, 2017
LAM RESEARCH CORPORATION
Yukinori Sakiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Frequency Modulation of Radiofrequency Powe...
Publication number
20170141002
Publication date
May 18, 2017
LAM RESEARCH CORPORATION
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
Publication number
20170096735
Publication date
Apr 6, 2017
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD TO TUNE TIOX STOICHIOMETRY USING ATOMIC LAYER DEPOSITED TI F...
Publication number
20160056037
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS TO DEPOSIT PURE TITANIUM THIN FILM AT LOW TEMP...
Publication number
20160056053
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Shruti Vivek Thombare
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADI...
Publication number
20150163860
Publication date
Jun 11, 2015
LAM RESEARCH CORPORATION
Vincent E. Burkhart
G02 - OPTICS
Information
Patent Application
PLASMA PROCESS ETCH-TO-DEPOSITION RATIO MODULATION VIA GROUND SURFA...
Publication number
20140127912
Publication date
May 8, 2014
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CREATION OF OFF-AXIS NULL MAGNETIC FIELD LOCUS FOR IMPROVED UNIFORM...
Publication number
20130206725
Publication date
Aug 15, 2013
Karl Leeser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLA...
Publication number
20120228125
Publication date
Sep 13, 2012
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...