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Ismail Emesh
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Gilbert, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
Patent number
8,268,135
Issue date
Sep 18, 2012
Novellus Systems, Inc.
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Filling deep features with conductors in semiconductor manufacturing
Patent number
7,625,814
Issue date
Dec 1, 2009
ASM NuTool, Inc.
Ismail Emesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for planar electroplating
Patent number
7,449,098
Issue date
Nov 11, 2008
Novellus Systems, Inc.
Steven T. Mayer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for the electrochemical deposition and planari...
Patent number
7,297,239
Issue date
Nov 20, 2007
Novellus Systems, Inc.
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Planar plating apparatus
Patent number
7,201,828
Issue date
Apr 10, 2007
Novellus Systems, Inc.
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for electrochemically depositing a material onto a workpi...
Patent number
7,033,464
Issue date
Apr 25, 2006
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
Patent number
6,974,525
Issue date
Dec 13, 2005
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and process for polishing a workpiece
Patent number
6,849,547
Issue date
Feb 1, 2005
SpeedFam-IPEC Corporation
Saket Chadda
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for cleaning workpieces
Patent number
6,818,604
Issue date
Nov 16, 2004
SpeedFam-IPEC Corporation
Ismail Emesh
G11 - INFORMATION STORAGE
Information
Patent Grant
Method and apparatus for the electrochemical deposition and planari...
Patent number
6,802,955
Issue date
Oct 12, 2004
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
Patent number
6,736,952
Issue date
May 18, 2004
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for electrochemically depositing a material on...
Patent number
6,572,755
Issue date
Jun 3, 2003
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR COPPER ELECTROPLATING
Publication number
20090065365
Publication date
Mar 12, 2009
ASM NUTOOL, INC.
Ayse Durmus
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR SELECTIVE ELECTROFILLING OF THROUGH-WAFER...
Publication number
20080237048
Publication date
Oct 2, 2008
Ismail Emesh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
FILLING DEEP FEATURES WITH CONDUCTORS IN SEMICONDUCTOR MANUFACTURING
Publication number
20070293040
Publication date
Dec 20, 2007
ASM NUTOOL, INC.
Ismail Emesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for conditioning conductive surfaces after electropolishing
Publication number
20070111523
Publication date
May 17, 2007
Ismail Emesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Solution for electrochemical mechanical polishing
Publication number
20070017818
Publication date
Jan 25, 2007
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for polishing copper on a workpiece surface
Publication number
20060255016
Publication date
Nov 16, 2006
Novellus Systems, Inc.
Julia Svirchevski
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
Publication number
20060081460
Publication date
Apr 20, 2006
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Methods and apparatuses for semiconductor fabrication utilizing thr...
Publication number
20060003566
Publication date
Jan 5, 2006
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lubricant for wafer polishing using a fixed abrasive pad
Publication number
20050121969
Publication date
Jun 9, 2005
Ismail Emesh
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for the electrochemical deposition and planari...
Publication number
20050016681
Publication date
Jan 27, 2005
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
Publication number
20040195110
Publication date
Oct 7, 2004
SpeedFam-IPEC Corporation
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Planar plating apparatus
Publication number
20040163950
Publication date
Aug 26, 2004
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for the electrochemical deposition and planari...
Publication number
20030132120
Publication date
Jul 17, 2003
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for polishing copper on a workpiece surface
Publication number
20030134576
Publication date
Jul 17, 2003
Saket Chadda
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for electrochemically depositing a material onto a workpi...
Publication number
20030127320
Publication date
Jul 10, 2003
Ismail Emesh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System and method for cleaning workpieces
Publication number
20030069150
Publication date
Apr 10, 2003
Ismail Emesh
B08 - CLEANING
Information
Patent Application
Method and apparatus for electrochemically depositing a material on...
Publication number
20020148732
Publication date
Oct 17, 2002
Ismail Emesh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Chemical mechanical polishing method and apparatus for removing mat...
Publication number
20020151255
Publication date
Oct 17, 2002
Tim Dyer
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and process for polishing a workpiece
Publication number
20020146908
Publication date
Oct 10, 2002
Saket Chadda
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for electrochemical planarization of a workpiece
Publication number
20020108861
Publication date
Aug 15, 2002
Ismail Emesh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR