Israel Wagner

Person

Monsey, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for sputter coating with variable target to su...
- Patent number 6,623,606
- Issue date Sep 23, 2003
- Tokyo Electron Limited of IBS Broadcast Center
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sputter coating with variable target to su...
- Patent number 6,416,635
- Issue date Jul 9, 2002
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process equipment with simultaneous or sequential deposition and et...
- Patent number 5,958,134
- Issue date Sep 28, 1999
- Tokyo Electron Limited
- Tugrul Yasar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stationary aperture plate for reactive sputter deposition
- Patent number 5,415,753
- Issue date May 16, 1995
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target cooling and support for magnetron sputter coating apparatus
- Patent number 5,409,590
- Issue date Apr 25, 1995
- Materials Research Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputter coating method and apparatus with rotating magnet...
- Patent number 5,130,005
- Issue date Jul 14, 1992
- Materials Research Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter coating process control method and apparatus
- Patent number 5,126,028
- Issue date Jun 30, 1992
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of improving ion flux distribution uniformity on a substrate
- Patent number 5,080,772
- Issue date Jan 14, 1992
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sputter coating stepped wafers
- Patent number 4,957,605
- Issue date Sep 18, 1990
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improving the uniformity ion bombardment i...
- Patent number 4,871,433
- Issue date Oct 3, 1989
- Materials Research Corporation
- Israel Wagner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for sputter coating with variable target to su...
- Publication number 20020144891
- Publication date Oct 10, 2002
- Tokyo Electron Limited of TBS Broadcast Center
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Israel Wagner

Person

Patents Grantslast 30 patents

Method and apparatus for sputter coating with variable target to su...

Method and apparatus for sputter coating with variable target to su...

Process equipment with simultaneous or sequential deposition and et...

Stationary aperture plate for reactive sputter deposition

Target cooling and support for magnetron sputter coating apparatus

Magnetron sputter coating method and apparatus with rotating magnet...

Sputter coating process control method and apparatus

Method of improving ion flux distribution uniformity on a substrate

Method and apparatus for sputter coating stepped wafers

Method and apparatus for improving the uniformity ion bombardment i...

Patents Applicationslast 30 patents

Method and apparatus for sputter coating with variable target to su...