Issei Funayoshi

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,575,413
- Issue date Feb 21, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,692,763
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Takeo Kihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150338746
- Publication date Nov 26, 2015
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20060216025
- Publication date Sep 28, 2006
- Canon Kabushiki Kaisha
- Takeo Kihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY