Issei Ueda

Person

Koshi-Machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,666,463
- Issue date May 30, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate processing apparatus, and subs...
- Patent number 9,373,531
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,978,670
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,845,262
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,662,811
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating/developing device and method
- Patent number 8,408,158
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus
- Patent number 8,302,556
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 8,206,076
- Issue date Jun 26, 2012
- Tokyo Electron Limited
- Issei Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing apparatus
- Patent number 7,793,609
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,281,869
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,267,497
- Issue date Sep 11, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method wit...
- Patent number 7,245,348
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,241,061
- Issue date Jul 10, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 6,919,913
- Issue date Jul 19, 2005
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,746,197
- Issue date Jun 8, 2004
- Tokyo Electron Limited
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment solution supply method and treatment solution supply unit
- Patent number 6,726,771
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,672,779
- Issue date Jan 6, 2004
- Tokyo Electron Limited
- Issei Ueda
- G08 - SIGNALLING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,656,281
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
- Patent number 6,655,891
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,471,422
- Issue date Oct 29, 2002
- Tokyo Electron Limited
- Issei Ueda
- G07 - CHECKING-DEVICES
Information Patent Grant
Multistage spin type substrate processing system
- Patent number 6,444,029
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Yoshio Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,439,822
- Issue date Aug 27, 2002
- Tokyo Electron Limited
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature and humidity controlled processing system
- Patent number 6,432,204
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 6,426,303
- Issue date Jul 30, 2002
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
- Patent number 6,425,722
- Issue date Jul 30, 2002
- Tokyo Electron Limited
- Issei Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 6,402,400
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of collecting substrates abnormally processed...
- Patent number 6,405,094
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,402,401
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Issei Ueda
- G07 - CHECKING-DEVICES
Information Patent Grant
Heat and cooling treatment apparatus and substrate processing system
- Patent number 6,402,508
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist coating and developing processing apparatus
- Patent number 6,399,518
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Issei Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150187621
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...
- Publication number 20140234058
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110311340
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMTED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110103923
- Publication date May 5, 2011
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110079252
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100326353
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100300353
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20090003825
- Publication date Jan 1, 2009
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus
- Publication number 20070056514
- Publication date Mar 15, 2007
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING/DEVELOPING DEVICE AND METHOD
- Publication number 20060201423
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060165409
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060164613
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060162646
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060162858
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030012575
- Publication date Jan 16, 2003
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020182040
- Publication date Dec 5, 2002
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020118973
- Publication date Aug 29, 2002
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treatment system, substrate transfer system, and substrat...
- Publication number 20020106268
- Publication date Aug 8, 2002
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Treatment solution supply method and treatment solution supply unit
- Publication number 20020092559
- Publication date Jul 18, 2002
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020088544
- Publication date Jul 11, 2002
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Treatment solution supply method and treatment solution supply unit
- Publication number 20010016427
- Publication date Aug 23, 2001
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat and cooling treatment apparatus and substrate processing system
- Publication number 20010013515
- Publication date Aug 16, 2001
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate transfer device, substrate processing apparatus, and subs...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and sto...

Substrate processing apparatus

Coating/developing device and method

Coating and developing apparatus

Substrate processing system

Coating and developing apparatus

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method wit...

Coating and developing system and coating and developing method

Processing system

Substrate processing apparatus and substrate processing method

Treatment solution supply method and treatment solution supply unit

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treatment system, substrate transfer system, and substrat...

Substrate processing apparatus and substrate processing method

Multistage spin type substrate processing system

Substrate processing apparatus and substrate processing method

Temperature and humidity controlled processing system

Processing system

Substrate treatment system, substrate transfer system, and substrat...

Substrate processing apparatus

Apparatus and method of collecting substrates abnormally processed...

Substrate processing apparatus and substrate processing method

Heat and cooling treatment apparatus and substrate processing system

Resist coating and developing processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS

SUBSTRATE PROCESSING SYSTEM

Coating and developing apparatus

COATING/DEVELOPING DEVICE AND METHOD

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treatment system, substrate transfer system, and substrat...

Treatment solution supply method and treatment solution supply unit

Substrate processing apparatus

Treatment solution supply method and treatment solution supply unit

Heat and cooling treatment apparatus and substrate processing system