Itaru Fujita

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage control method, exposure method, exposure apparatus and devic...
- Patent number 6,809,798
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Itaru Fujita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,809,802
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,762,826
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 6,654,096
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Itaru Fujita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,825,247
- Issue date Apr 25, 1989
- Canon Kabushiki Kaisha
- Ryuichi Kemi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate attracting and holding system for use in exposure apparatus
- Publication number 20040036850
- Publication date Feb 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY