Itaru HAGIWARA

Follow

Person

Hino-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transport apparatus and method for manufacturing magnetic...
- Patent number 8,534,975
- Issue date Sep 17, 2013
- Canon Anelva Corporation
- Itaru Hagiwara
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND METHOD FOR MANUFACTURING MAGNETIC...
- Publication number 20100101075
- Publication date Apr 29, 2010
- Canon ANELVA Corporation
- Itaru HAGIWARA
- G05 - CONTROLLING REGULATING