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Itay Gdor
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Halevi, IL
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last 30 patents
Information
Patent Grant
Targets for diffraction-based overlay error metrology
Patent number
12,105,414
Issue date
Oct 1, 2024
KLA Corporation
Itay Gdor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Annular apodizer for small target overlay measurement
Patent number
12,105,431
Issue date
Oct 1, 2024
KLA Corporation
Itay Gdor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning overlay metrology using overlay targets having multiple sp...
Patent number
11,796,925
Issue date
Oct 24, 2023
KLA Corporation
Yuval Lubashevsky
G01 - MEASURING TESTING
Information
Patent Grant
Non-orthogonal target and method for using the same in measuring mi...
Patent number
11,409,205
Issue date
Aug 9, 2022
KLA Corporation
Itay Gdor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
On-the-fly scatterometry overlay metrology target
Patent number
11,378,394
Issue date
Jul 5, 2022
KLA Corporation
Yuri Paskover
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SINGLE GRAB PUPIL LANDSCAPE VIA BROADBAND ILLUMINATION
Publication number
20240402615
Publication date
Dec 5, 2024
KLA Corporation
Yaniv Weiss
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING...
Publication number
20240337952
Publication date
Oct 10, 2024
KLA Corporation
Itay Gdor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVER...
Publication number
20240337953
Publication date
Oct 10, 2024
KLA Corporation
Itay Gdor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-OVERLAY STACKED GRATING METROLOGY TARGET
Publication number
20240302751
Publication date
Sep 12, 2024
KLA Corporation
Jordan Pio
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR SUPPRESSION OF TOOL INDUCED SHIFT IN SCANNING...
Publication number
20240167813
Publication date
May 23, 2024
KLA Corporation
Itay Gdor
G01 - MEASURING TESTING
Information
Patent Application
IMPROVED TARGETS FOR DIFFRACTION-BASED OVERLAY ERROR METROLOGY
Publication number
20240118606
Publication date
Apr 11, 2024
KLA Corporation
Itay GDOR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY
Publication number
20240068804
Publication date
Feb 29, 2024
KLA Corporation
Yuval Lubashevsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ISOLATION OF SPECIFIC FOURIER PUPIL FREQUENCY...
Publication number
20230314344
Publication date
Oct 5, 2023
Yuri Paskover
G01 - MEASURING TESTING
Information
Patent Application
SCANNING SCATTEROMETRY OVERLAY METROLOGY
Publication number
20230314319
Publication date
Oct 5, 2023
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
ANNULAR APODIZER FOR SMALL TARGET OVERLAY MEASUREMENT
Publication number
20230236113
Publication date
Jul 27, 2023
KLA Corporation
Itay GDOR
G01 - MEASURING TESTING
Information
Patent Application
SCANNING OVERLAY METROLOGY USING OVERLAY TARGETS HAVING MULTIPLE SP...
Publication number
20230213875
Publication date
Jul 6, 2023
Yuval Lubashevsky
G01 - MEASURING TESTING
Information
Patent Application
ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET
Publication number
20220187062
Publication date
Jun 16, 2022
KLA Corporation
Yuri Paskover
G01 - MEASURING TESTING
Information
Patent Application
Non-Orthogonal Target and Method for Using the Same in Measuring Mi...
Publication number
20210364935
Publication date
Nov 25, 2021
Itay Gdor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY