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Itsuko Suzuki
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Tsukuba, JP
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last 30 patents
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Patent Grant
Method for establishing a fluid containing size-controlled particles
Patent number
6,254,787
Issue date
Jul 3, 2001
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Masao Kimura
B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
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Patent Grant
Method to detect metal impurities in the semiconductor process gases
Patent number
5,882,378
Issue date
Mar 16, 1999
L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Geo...
Kohei Tarutani
G01 - MEASURING TESTING