Itsushi Iio

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Niihama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 7,361,905
- Issue date Apr 22, 2008
- Sumitomo Heavy Industries, Ltd.
- Toshiharu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage base, substrate processing apparatus, and maintenance method...
- Patent number 7,060,990
- Issue date Jun 13, 2006
- Sumitomo Heavy Industries, Ltd.
- Toshiharu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Stage base, substrate processing apparatus, and maintenance method...
- Publication number 20040259364
- Publication date Dec 23, 2004
- Sumitomo Heavy Industries, Ltd.
- Toshiharu Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and maintenance method therefor
- Publication number 20040211924
- Publication date Oct 28, 2004
- Sumitomo Heavy Industries, Ltd.
- Toshiharu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS