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Iu-Ren Chen
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Taipei City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method and structure for lithography processes with focus monitorin...
Patent number
9,383,657
Issue date
Jul 5, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Jhih-Yu Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method and Structure for Lithography Processes with Focus Monitorin...
Publication number
20150248068
Publication date
Sep 3, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Jhih-Yu Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY