Ivan L. Berry, III

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Ellicott City, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and process for treating dielectric materials
- Patent number 7,709,814
- Issue date May 4, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet assisted porogen removal and/or curing processes for fo...
- Patent number 7,629,272
- Issue date Dec 8, 2009
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine-free plasma curing process for porous low-k materials
- Patent number 7,011,868
- Issue date Mar 14, 2006
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma curing process for porous low-k materials
- Patent number 6,913,796
- Issue date Jul 5, 2005
- Axcelis Technologies, Inc.
- Ralph Albano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...