Ivan Maleev

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspecting pattern collapse defects
- Patent number 11,989,876
- Issue date May 21, 2024
- Tokyo Electron Limited
- Shin-Yee Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern collapse defects
- Patent number 11,676,266
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Shin-Yee Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Raman sensor for supercritical fluids metrology
- Patent number 11,664,283
- Issue date May 30, 2023
- Tokyo Electron Limited
- Ivan Maleev
- B08 - CLEANING
Information Patent Grant
System, method and apparatus for polarization control
- Patent number 11,415,725
- Issue date Aug 16, 2022
- KLA Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Grant
Apparatus and method for monitoring and measuring properties of pol...
- Patent number 11,385,154
- Issue date Jul 12, 2022
- Tokyo Electron Limited
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
System, method and apparatus for polarization control
- Patent number 10,921,488
- Issue date Feb 16, 2021
- KLA Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Optical sensor for phase determination
- Patent number 10,837,902
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for biomechanically-based eye signals for inter...
- Patent number 10,564,714
- Issue date Feb 18, 2020
- Google LLC
- Lewis James Marggraff
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
System, method and apparatus for polarization control
- Patent number 9,995,850
- Issue date Jun 12, 2018
- KLA-Tencor Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-spot illumination for improved detection sensitivity
- Patent number 9,494,531
- Issue date Nov 15, 2016
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge detection and inspection
- Patent number 9,377,416
- Issue date Jun 28, 2016
- KLA-Tencor Corp.
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 9,279,774
- Issue date Mar 8, 2016
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Optical surface scanning systems and methods
- Patent number 9,182,341
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Transmissive-reflective photocathode
- Patent number 9,076,639
- Issue date Jul 7, 2015
- KLA-Tencor Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Angular resolved spectroscopic scatterometer
- Patent number 8,502,977
- Issue date Aug 6, 2013
- KLA-Tencor Corporation
- Ivan Maleev
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT
- Publication number 20240418501
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
WAFER TEMPERATURE MEASUREMENT FOR WET ETCHING BATH APPLICATIONS
- Publication number 20240242987
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS
- Publication number 20230395408
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERN COLLAPSE DEFECTS
- Publication number 20230274413
- Publication date Aug 31, 2023
- TOKYO ELECTRON LIMITED
- Shin-Yee LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RAMAN SENSOR FOR SUPERCRITICAL FLUIDS METROLOGY
- Publication number 20230055423
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- B08 - CLEANING
Information Patent Application
OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A S...
- Publication number 20230057763
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A S...
- Publication number 20230055839
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Sensor for Inspecting Pattern Collapse Defects
- Publication number 20220139743
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Inspecting Pattern Collapse Defects
- Publication number 20220138921
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Shin-Yee LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR MONITORING AND MEASURING PROPERTIES OF POL...
- Publication number 20220099545
- Publication date Mar 31, 2022
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL
- Publication number 20210173122
- Publication date Jun 10, 2021
- KLA Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SENSOR FOR PHASE DETERMINATION
- Publication number 20190056320
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
System, Method and Apparatus For Polarization Control
- Publication number 20180292574
- Publication date Oct 11, 2018
- KLA-Tencor Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR BIOMECHANICALLY-BASED EYE SIGNALS FOR INTER...
- Publication number 20180011533
- Publication date Jan 11, 2018
- Google Inc.
- Lewis James Marggraff
- G02 - OPTICS
Information Patent Application
SYSTEMS AND METHODS FOR BIOMECHANICALLY-BASED EYE SIGNALS FOR INTER...
- Publication number 20170123492
- Publication date May 4, 2017
- Eyefluence, Inc.
- Lewis James Marggraff
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20150369753
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Wafer Edge Detection and Inspection
- Publication number 20150330914
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Illumination For Improved Detection Sensitivity
- Publication number 20150041666
- Publication date Feb 12, 2015
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
System, Method and Apparatus For Polarization Control
- Publication number 20140361152
- Publication date Dec 11, 2014
- Ivan Maleev
- G02 - OPTICS
Information Patent Application
OPTICAL SURFACE SCANNING SYSTEMS AND METHODS
- Publication number 20130335736
- Publication date Dec 19, 2013
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Application
TRANSMISSIVE-REFLECTIVE PHOTOCATHODE
- Publication number 20130126705
- Publication date May 23, 2013
- KLA-Tencor Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20130016346
- Publication date Jan 17, 2013
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING

Ivan Maleev

Person

Patents Grantslast 30 patents

Method and apparatus for inspecting pattern collapse defects

Method and apparatus for inspecting pattern collapse defects

Raman sensor for supercritical fluids metrology

System, method and apparatus for polarization control

Apparatus and method for monitoring and measuring properties of pol...

System, method and apparatus for polarization control

Optical sensor for phase determination

Systems and methods for biomechanically-based eye signals for inter...

Wafer inspection

System, method and apparatus for polarization control

Wafer inspection

TDI sensor in a darkfield system

Multi-spot illumination for improved detection sensitivity

Wafer edge detection and inspection

Wafer inspection

Optical surface scanning systems and methods

Transmissive-reflective photocathode

Angular resolved spectroscopic scatterometer

Patents Applicationslast 30 patents

OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT

WAFER TEMPERATURE MEASUREMENT FOR WET ETCHING BATH APPLICATIONS

OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS

METHOD AND APPARATUS FOR INSPECTING PATTERN COLLAPSE DEFECTS

RAMAN SENSOR FOR SUPERCRITICAL FLUIDS METROLOGY

OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A S...

OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A S...

Optical Sensor for Inspecting Pattern Collapse Defects

Method and Apparatus for Inspecting Pattern Collapse Defects

APPARATUS AND METHOD FOR MONITORING AND MEASURING PROPERTIES OF POL...

SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL

OPTICAL SENSOR FOR PHASE DETERMINATION

System, Method and Apparatus For Polarization Control

Wafer Inspection

SYSTEMS AND METHODS FOR BIOMECHANICALLY-BASED EYE SIGNALS FOR INTER...

SYSTEMS AND METHODS FOR BIOMECHANICALLY-BASED EYE SIGNALS FOR INTER...

TDI Sensor in a Darkfield System

Wafer Inspection

Wafer Edge Detection and Inspection

Multi-Spot Illumination For Improved Detection Sensitivity

System, Method and Apparatus For Polarization Control

OPTICAL SURFACE SCANNING SYSTEMS AND METHODS

TRANSMISSIVE-REFLECTIVE PHOTOCATHODE

Wafer Inspection