Ivaylo W. Rangelow

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Baunatal, DE

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Patents Applicationslast 30 patents

Information Patent Application
Apparatus for loading a substrate onto a processing surface in a th...
- Publication number 20020081173
- Publication date Jun 27, 2002
- Oxford Instruments Plasma Technology Limited
- Roger J. W. Croad
- H01 - BASIC ELECTRIC ELEMENTS