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Iwao Mihara
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Tokyo, JP
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last 30 patents
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Patent Grant
Polishing pad and production method thereof
Patent number
7,922,783
Issue date
Apr 12, 2011
JSR Corporation
Fujio Sakurai
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
POLISHING PAD AND PRODUCTION METHOD THEREOF
Publication number
20080313967
Publication date
Dec 25, 2008
JSR Corporation
Fujio Sakurai
B24 - GRINDING POLISHING
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Patent Application
Polishing pad and production method thereof
Publication number
20040224622
Publication date
Nov 11, 2004
JSR Corporation
Fujio Sakurai
B24 - GRINDING POLISHING