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Iwao Suzuki
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Osaka-shi, JP
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last 30 patents
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Patent Grant
Thin film forming apparatus and thin film forming method
Patent number
9,469,897
Issue date
Oct 18, 2016
Sharp Kabushiki Kaisha
Yoshimasa Chikama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD
Publication number
20140021037
Publication date
Jan 23, 2014
Sharp Kabushiki Kaisha
Yoshimasa Chikama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...