Izumi HASEGAWA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate defect inspection apparatus, method of adjusting sensitiv...
- Patent number 10,249,034
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Yasuhiro Kitada
- G01 - MEASURING TESTING
Information Patent Grant
Liquid treatment method, substrate processing apparatus and non-tra...
- Patent number 9,766,543
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect analyzing apparatus, substrate processing system, defect ana...
- Patent number 9,342,880
- Issue date May 17, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate reference image creation method, substrate defect inspect...
- Patent number 9,146,479
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Izumi Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment apparatus, substrate treatment method and non-t...
- Patent number 8,885,140
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Tomohiro Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus
- Patent number 6,391,111
- Issue date May 21, 2002
- Tokyo Electron Limited
- Akihiro Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for supplying a process solution
- Patent number 6,193,783
- Issue date Feb 27, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE DEFECT INSPECTION APPARATUS, METHOD OF ADJUSTING SENSITIV...
- Publication number 20180005370
- Publication date Jan 4, 2018
- TOKYO ELECTRON LIMITED
- Yasuhiro Kitada
- G01 - MEASURING TESTING
Information Patent Application
LIQUID TREATMENT METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRA...
- Publication number 20150234277
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...
- Publication number 20150125068
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...
- Publication number 20140160451
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Izumi HASEGAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND NON-T...
- Publication number 20130057836
- Publication date Mar 7, 2013
- TOKYO ELECTRON LIMITED
- Tomohiro NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS

Izumi HASEGAWA

Person

Patents Grantslast 30 patents

Substrate defect inspection apparatus, method of adjusting sensitiv...

Liquid treatment method, substrate processing apparatus and non-tra...

Defect analyzing apparatus, substrate processing system, defect ana...

Substrate reference image creation method, substrate defect inspect...

Substrate treatment apparatus, substrate treatment method and non-t...

Coating apparatus

Apparatus and method for supplying a process solution

Patents Applicationslast 30 patents

SUBSTRATE DEFECT INSPECTION APPARATUS, METHOD OF ADJUSTING SENSITIV...

LIQUID TREATMENT METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRA...

DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...

SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...

SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND NON-T...