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Izumi Kawahara
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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
10,725,388
Issue date
Jul 28, 2020
Canon Kabushiki Kaisha
Masato Homma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20200081354
Publication date
Mar 12, 2020
Canon Kabushiki Kaisha
Masato Homma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING...
Publication number
20140118728
Publication date
May 1, 2014
Canon Kabushiki Kaisha
Yoshihiro SHIODE
G01 - MEASURING TESTING
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Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Publication number
20130015599
Publication date
Jan 17, 2013
Canon Kabushiki Kaisha
Izumi Kawahara
B82 - NANO-TECHNOLOGY