-
Method for thermal chemical vapor deposition
-
Patent number 5,851,589
-
Issue date Dec 22, 1998
-
Nihon Shinku Gijutsu Kabushiki Kaisha
-
Izumi Nakayama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Apparatus for chemical vapor deposition
-
Patent number 5,244,501
-
Issue date Sep 14, 1993
-
Nihon Shinku Gijutsu Kabushiki Kaisha
-
Izumi Nakayama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Vacuum processing apparatus
-
Patent number 5,125,360
-
Issue date Jun 30, 1992
-
Nihon Shinku Gijutsu Kabushiki Kaisha
-
Izumi Nakayama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
Apparatus for chemical vapor deposition
-
Patent number 4,924,807
-
Issue date May 15, 1990
-
Nihon Shinku Gijutsu Kabushiki Kaisha
-
Izumi Nakayama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Vacuum processing method and apparatus
-
Patent number 4,902,531
-
Issue date Feb 20, 1990
-
Nihon Shinku Gijutsu Kabushiki Kaisha
-
Izumi Nakayama
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-