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Izumi Oya
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for removing photoresist film
Patent number
7,965,372
Issue date
Jun 21, 2011
Mitsubishi Denki Kabushiki Kaisha
Seiji Noda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment apparatus
Patent number
6,955,178
Issue date
Oct 18, 2005
Mitsubishi Denki Kabushiki Kaisha
Masaki Kuzumoto
B08 - CLEANING
Information
Patent Grant
Apparatus for removing photoresist film
Patent number
6,715,944
Issue date
Apr 6, 2004
Mitsubishi Denki Kabushiki Kaisha
Izumi Oya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method
Patent number
6,616,773
Issue date
Sep 9, 2003
Mitsubishi Denki Kabushiki Kaisha
Masaki Kuzumoto
B08 - CLEANING
Information
Patent Grant
Method of removing photoresist film
Patent number
6,517,999
Issue date
Feb 11, 2003
Shimada Rika Kougyo Kabushiki Kaisha
Izumi Oya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing photoresist film and apparatus used therefor
Patent number
6,517,998
Issue date
Feb 11, 2003
Mitsubishi Denki Kabushiki Kaisha
Seiji Noda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing method, and apparatus therefor
Publication number
20030066549
Publication date
Apr 10, 2003
Seiji Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for removing photoresist film
Publication number
20020115025
Publication date
Aug 22, 2002
Mitsubishi Denki Kabushiki Kaisha
Seiji Noda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for removing photoresist film
Publication number
20020115024
Publication date
Aug 22, 2002
Mitsubishi Denki Kabushiki Kaisha
Izumi Oya
H01 - BASIC ELECTRIC ELEMENTS