Izumi Satoh

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vertical thermal processing apparatus and substrate supporter
- Patent number 8,940,096
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Satoshi Asari
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VERTICAL THERMAL PROCESSING APPARATUS AND SUBSTRATE SUPPORTER
- Publication number 20100058982
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Satoshi ASARI
- H01 - BASIC ELECTRIC ELEMENTS