Izumi Tsukamoto

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus
- Patent number 7,755,740
- Issue date Jul 13, 2010
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,809,802
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,762,826
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 6,654,096
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Itaru Fujita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus measurement in projection exposure apparatus
- Patent number 6,633,390
- Issue date Oct 14, 2003
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting coma of projection optical system
- Patent number 5,760,879
- Issue date Jun 2, 1998
- Canon Kabushiki Kaisha
- Hirohiko Shinonaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer apparatus for compensating for a transfer error
- Patent number 4,538,914
- Issue date Sep 3, 1985
- Canon Kabushiki Kaisha
- Minoru Yomoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080187872
- Publication date Aug 7, 2008
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate attracting and holding system for use in exposure apparatus
- Publication number 20040036850
- Publication date Feb 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focus measurement in projection exposure apparatus
- Publication number 20020015158
- Publication date Feb 7, 2002
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, coating/developing system, device manufacturing...
- Publication number 20020011207
- Publication date Jan 31, 2002
- Shigeyuki Uzawa
- H01 - BASIC ELECTRIC ELEMENTS

Izumi Tsukamoto

Person

Patents Grantslast 30 patents

Exposure apparatus

Substrate attracting and holding system for use in exposure apparatus

Substrate attracting and holding system for use in exposure apparatus

Exposure apparatus, and device manufacturing method

Focus measurement in projection exposure apparatus

Method of detecting coma of projection optical system

Transfer apparatus for compensating for a transfer error

Patents Applicationslast 30 patents

EXPOSURE APPARATUS

Substrate attracting and holding system for use in exposure apparatus

Focus measurement in projection exposure apparatus

Exposure apparatus, coating/developing system, device manufacturing...