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Izuru Iseki
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Thin film forming apparatus and thin film forming method
Patent number
7,017,637
Issue date
Mar 28, 2006
Dainippon Screen Mfg. Co. Ltd.
Tsutomu Ueyama
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Thin film forming apparatus and thin film forming method
Patent number
6,926,057
Issue date
Aug 9, 2005
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Thin film forming apparatus and thin film forming method
Patent number
6,918,421
Issue date
Jul 19, 2005
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,893,805
Issue date
May 17, 2005
Dainippon Screen Mfg. Co., Ltd.
Izuru Iseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating method and apparatus
Patent number
6,174,371
Issue date
Jan 16, 2001
Dainippon Screen Mfg. Co., Ltd.
Izuru Iseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing substrates
Patent number
6,074,515
Issue date
Jun 13, 2000
Dainippon Screen Mfg. Co., Ltd.
Izuru Iseki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20060113021
Publication date
Jun 1, 2006
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
B32 - LAYERED PRODUCTS
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20050230035
Publication date
Oct 20, 2005
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20050139313
Publication date
Jun 30, 2005
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
B32 - LAYERED PRODUCTS
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20030079829
Publication date
May 1, 2003
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
B32 - LAYERED PRODUCTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20030064609
Publication date
Apr 3, 2003
Dainippon Screen Mfg. Co., Ltd.
Izuru Iseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20030056890
Publication date
Mar 27, 2003
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thin film forming apparatus and thin film forming method
Publication number
20030056725
Publication date
Mar 27, 2003
Dainippon Screen Mfg. Co., Ltd.
Tsutomu Ueyama
B32 - LAYERED PRODUCTS