-
Tungsten disilicide CVD
-
Patent number 4,966,869
-
Issue date Oct 30, 1990
-
Spectrum CVD, Inc.
-
Joseph T. Hillman
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
Vacuum load lock
-
Patent number 4,861,563
-
Issue date Aug 29, 1989
-
Spectrum CVD, Inc.
-
Brian H. Shekerjian
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
Process for CVD of tungsten
-
Patent number 4,749,597
-
Issue date Jun 7, 1988
-
Spectrum CVD, Inc.
-
John Mendonca
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
Plasma enhanced CVD
-
Patent number 4,692,343
-
Issue date Sep 8, 1987
-
Spectrum CVD, Inc.
-
J. B. Price
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
CVD heat source
-
Patent number 4,640,224
-
Issue date Feb 3, 1987
-
Spectrum CVD, Inc.
-
Matthew L. Bunch
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
CVD temperature control
-
Patent number 4,632,056
-
Issue date Dec 30, 1986
-
Robert W. Stitz
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
CVD plasma reactor
-
Patent number 4,632,057
-
Issue date Dec 30, 1986
-
Spectrum CVD, Inc.
-
J. B. Price
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-