J. David Casey JR.

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West Roxbury, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Photolithography mask repair
- Patent number 7,504,182
- Issue date Mar 17, 2009
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam processing
- Patent number 6,753,538
- Issue date Jun 22, 2004
- FEI Company
- Christian R. Musil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for repairing lithography masks using a charge...
- Patent number 6,709,554
- Issue date Mar 23, 2004
- FEI Company
- David C. Ferranti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern film repair using a focused particle beam system
- Patent number 6,042,738
- Issue date Mar 28, 2000
- Micrion Corporation
- J. David Casey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Electron beam processing for mask repair
- Publication number 20040226814
- Publication date Nov 18, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photolithography mask repair
- Publication number 20040151991
- Publication date Aug 5, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electron beam processing
- Publication number 20030047691
- Publication date Mar 13, 2003
- Christian R. Musil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for repairing lithography masks using a charge...
- Publication number 20010027917
- Publication date Oct 11, 2001
- David C. Ferranti
- H01 - BASIC ELECTRIC ELEMENTS