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J. S. Whang
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Scottsdale, AZ, US
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last 30 patents
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Patent Grant
Cantilever apparatus and method for loading wafer boats into cantil...
Patent number
4,767,251
Issue date
Aug 30, 1988
Amtech Systems, Inc.
J. S. Whang
C30 - CRYSTAL GROWTH
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Patent Grant
Slotted cantilever diffusion tube system and method and apparatus f...
Patent number
4,543,059
Issue date
Sep 24, 1985
Quartz Engineering & Materials, Inc.
J. S. Whang
F27 - FURNACES KILNS OVENS RETORTS