Jaakko Anttila

Person

  • Helsinki, FI

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PRECURSOR CAPSULE, A VESSEL AND A METHOD

    • Publication number 20220195595
    • Publication date Jun 23, 2022
    • ASM IP HOLDING B.V.
    • Chiyu Zhu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

    • Publication number 20210399111
    • Publication date Dec 23, 2021
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION

    • Publication number 20200365416
    • Publication date Nov 19, 2020
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

    • Publication number 20200328285
    • Publication date Oct 15, 2020
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods for forming silicon nitride thin films

    • Publication number 20200203145
    • Publication date Jun 25, 2020
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION

    • Publication number 20190103285
    • Publication date Apr 4, 2019
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

    • Publication number 20190043962
    • Publication date Feb 7, 2019
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS

    • Publication number 20180061648
    • Publication date Mar 1, 2018
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS

    • Publication number 20170098546
    • Publication date Apr 6, 2017
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION

    • Publication number 20170098550
    • Publication date Apr 6, 2017
    • ASM IP HOLDING B.V
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUSES FOR THIN FILM DEPOSITION

    • Publication number 20170029947
    • Publication date Feb 2, 2017
    • ASM IP HOLDING B.V.
    • Jun Kawahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION

    • Publication number 20160247695
    • Publication date Aug 25, 2016
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

    • Publication number 20160118261
    • Publication date Apr 28, 2016
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS

    • Publication number 20140273452
    • Publication date Sep 18, 2014
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR FORMING SILICON NITRIDE THIN FILMS

    • Publication number 20140273527
    • Publication date Sep 18, 2014
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...