TREA

Jaakko Anttila

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  • Helsinki, FI
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Patents Grantslast 30 patents

  • Information Patent Grant

    Precursor capsule, a vessel and a method
    • Patent number 12,129,545
    • Issue date Oct 29, 2024
    • ASM IP Holding B.V.
    • Chiyu Zhu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for forming silicon nitride thin films
    • Patent number 11,646,194
    • Issue date May 9, 2023
    • ASM IP Holding B.V.
    • Antti Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatuses for thin film deposition
    • Patent number 11,421,321
    • Issue date Aug 23, 2022
    • ASM IP Holding B.V.
    • Jun Kawahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Titanium aluminum and tantalum aluminum thin films
    • Patent number 11,139,383
    • Issue date Oct 5, 2021
    • ASM IP Holding B.V.
    • Suvi Haukka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Removal of surface passivation
    • Patent number 11,062,914
    • Issue date Jul 13, 2021
    • ASM IP Holding B.V.
    • Antti Juhani Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Removal of surface passivation
    • Patent number 10,741,411
    • Issue date Aug 11, 2020
    • ASM IP Holding B.V.
    • Antti Juhani Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Titanium aluminum and tantalum aluminum thin films
    • Patent number 10,636,889
    • Issue date Apr 28, 2020
    • ASM IP Holding B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for forming silicon nitride thin films
    • Patent number 10,573,511
    • Issue date Feb 25, 2020
    • ASM IP Holding B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Removal of surface passivation
    • Patent number 10,115,603
    • Issue date Oct 30, 2018
    • ASM IP Holding B.V.
    • Antti Juhani Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition of smooth metal nitride films
    • Patent number 10,074,541
    • Issue date Sep 11, 2018
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Titanium aluminum and tantalum aluminum thin films
    • Patent number 10,002,936
    • Issue date Jun 19, 2018
    • ASM IP Holding B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition of smooth metal nitride films
    • Patent number 9,704,716
    • Issue date Jul 11, 2017
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Removal of surface passivation
    • Patent number 9,490,145
    • Issue date Nov 8, 2016
    • ASM IP Holding B.V.
    • Antti Juhani Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition of smooth metal nitride films
    • Patent number 9,412,602
    • Issue date Aug 9, 2016
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PRECURSOR CAPSULE, A VESSEL AND A METHOD
    • Publication number 20220195595
    • Publication date Jun 23, 2022
    • ASM IP HOLDING B.V.
    • Chiyu Zhu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
    • Publication number 20210399111
    • Publication date Dec 23, 2021
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION
    • Publication number 20200365416
    • Publication date Nov 19, 2020
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
    • Publication number 20200328285
    • Publication date Oct 15, 2020
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods for forming silicon nitride thin films
    • Publication number 20200203145
    • Publication date Jun 25, 2020
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION
    • Publication number 20190103285
    • Publication date Apr 4, 2019
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
    • Publication number 20190043962
    • Publication date Feb 7, 2019
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS
    • Publication number 20180061648
    • Publication date Mar 1, 2018
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS
    • Publication number 20170098546
    • Publication date Apr 6, 2017
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION
    • Publication number 20170098550
    • Publication date Apr 6, 2017
    • ASM IP HOLDING B.V
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUSES FOR THIN FILM DEPOSITION
    • Publication number 20170029947
    • Publication date Feb 2, 2017
    • ASM IP HOLDING B.V.
    • Jun Kawahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION
    • Publication number 20160247695
    • Publication date Aug 25, 2016
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
    • Publication number 20160118261
    • Publication date Apr 28, 2016
    • ASM IP HOLDING B.V.
    • Suvi Haukka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION OF SMOOTH METAL NITRIDE FILMS
    • Publication number 20140273452
    • Publication date Sep 18, 2014
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR FORMING SILICON NITRIDE THIN FILMS
    • Publication number 20140273527
    • Publication date Sep 18, 2014
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...