Jaakko SAARILAHTI

Follow

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical capacitive pressure sensor having a valve po...
- Patent number 11,767,218
- Issue date Sep 26, 2023
- Teknologian tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromechanical element and method for manufacturing the same
- Patent number 11,697,586
- Issue date Jul 11, 2023
- Teknologian tutkimuskeskus VTT Oy
- Aarne Oja
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromechanical element and method for manufacturing the same
- Patent number 10,807,861
- Issue date Oct 20, 2020
- Teknologian tutkimuskeskus VTT Oy
- Aarne Oja
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Pressure sensor
- Publication number 20220048761
- Publication date Feb 17, 2022
- Teknologian Tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surface micromechanical element and method for manufacturing the same
- Publication number 20210002127
- Publication date Jan 7, 2021
- Teknologian Tutkimuskeskus VTT Oy
- Aarne Oja
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surface micromechanical element and method for manufacturing the same
- Publication number 20190119102
- Publication date Apr 25, 2019
- Teknologian Tutkimuskeskus VTT Oy
- Aarne Oja
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CAPACITIVE PRESSURE SENSOR AND MANUFACTURING METHOD
- Publication number 20180188127
- Publication date Jul 5, 2018
- Teknologian Tutkimuskeskus VTT Oy
- Vladimir ERMOLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY