Jaako Anttila

Person

  • Helsinki, FI

Patents Applicationslast 30 patents

  • Information Patent Application

    METHODS FOR THIN FILM DEPOSITION

    • Publication number 20170032956
    • Publication date Feb 2, 2017
    • ASM IP HOLDING B.V.
    • Jun Kawahara
    • H01 - BASIC ELECTRIC ELEMENTS