TREA

Jackie Zhang

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  • Cupertino, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Apparatus for HF-HF cleaning
    • Patent number 6,170,110
    • Issue date Jan 9, 2001
    • Lam Research Corporation
    • Julia Svirchevski
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of HF-HF Cleaning
    • Patent number 6,093,254
    • Issue date Jul 25, 2000
    • Lam Research Corporation
    • Julia Svirchevski
    • H01 - BASIC ELECTRIC ELEMENTS