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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of heating/cooling a substrate
Patent number
9,781,773
Issue date
Oct 3, 2017
Taiwan Semiconductor Manufacturing Company, Ltd
Jui-Chun Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotatable heating-cooling plate and element in proximity thereto
Patent number
9,282,592
Issue date
Mar 8, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Chun Peng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF HEATING/COOLING A SUBSTRATE
Publication number
20160183329
Publication date
Jun 23, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Chun PENG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ROTATABLE PLATE AND HEATING/COOLING ELEMENT IN PROXIMITY THERETO
Publication number
20100219175
Publication date
Sep 2, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Chun Peng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR