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Jacob Fredrik Friso Klinkhamer
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Delft, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Illumination system coherence remover with two sets of stepped mirrors
Patent number
8,164,740
Issue date
Apr 24, 2012
ASML Holding N.V.
Huibert Visser
G02 - OPTICS
Information
Patent Grant
Illumination system coherence remover with a series of partially re...
Patent number
8,159,651
Issue date
Apr 17, 2012
ASML Holding N.V.
Huibert Visser
G02 - OPTICS
Information
Patent Grant
Alignment marker and lithographic apparatus and device manufacturin...
Patent number
7,781,237
Issue date
Aug 24, 2010
ASML Netherlands B.V.
Gert-Jan Heerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning lithographic apparatus and device manufacturing method
Patent number
7,609,362
Issue date
Oct 27, 2009
ASML Netherlands B.V.
Pieter Willem Herman De Jager
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus for imaging a front side or a back side of a...
Patent number
7,480,028
Issue date
Jan 20, 2009
ASML Netherlands B.V.
Michael Van Der Veen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of calibration, calibration plate, d...
Patent number
6,955,074
Issue date
Oct 18, 2005
ASML Netherlands, B.V.
Leon Martin Levasier
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Illumination System
Publication number
20090168072
Publication date
Jul 2, 2009
ASML Netherlands B.V. and ASML Holding N.V.
Huibert VISSER
G02 - OPTICS
Information
Patent Application
Illumination System
Publication number
20090091734
Publication date
Apr 9, 2009
ASML Netherlands B.V. and ASML Holding N.V.
Huibert VISSER
G02 - OPTICS
Information
Patent Application
Lithographic apparatus, method of calibration, calibration plate, d...
Publication number
20050138988
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Leon Martin Levasier
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY