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Patents Grants
last 30 patents
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Patent Grant
Sensor and lithographic apparatus
Patent number
7,459,669
Issue date
Dec 2, 2008
ASML Netherlands B.V.
Rob Adrianus Antonius Maria Bastiaensen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
WAVELENGTH SELECTION MODULE, ILLUMINATION SYSTEM AND METROLOGY SYSTEM
Publication number
20220299365
Publication date
Sep 22, 2022
ASML NETHERLANDS B.V.
Gerbrand VAN DER ZOUW
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Passive reticle tool, a lithographic apparatus and a method of patt...
Publication number
20100182582
Publication date
Jul 22, 2010
ASML NETHERLANDS B.V,
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Lithographic projection system and projection lens polarization sensor
Publication number
20100118288
Publication date
May 13, 2010
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Apparatus, Method for Determining at Least One Polariz...
Publication number
20100045956
Publication date
Feb 25, 2010
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Sensor and lithographic apparatus
Publication number
20070152178
Publication date
Jul 5, 2007
ASML NETHERLANDS B.V.
Rob Adrianus Antonius Maria Bastiaensen
G01 - MEASURING TESTING