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Solids vaporizer
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Patent number 12,037,684
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Issue date Jul 16, 2024
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Entegris, Inc.
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Benjamin Cardozo
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vaporization vessel and method
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Patent number 11,821,087
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Issue date Nov 21, 2023
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Entegris, Inc.
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Bryan C. Hendrix
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Tamper-resistant chemical reagent package
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Patent number 11,136,169
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Issue date Oct 5, 2021
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Entegris, Inc.
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Thomas B. Chatterton
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Modular tray ampoule
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Patent number 11,104,993
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Issue date Aug 31, 2021
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Entegris, Inc.
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Jordan Hodges
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...