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Jacobus Johannus Leonardus Hendricus Verspay
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Thorn, NL
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160124321
Publication date
May 5, 2016
ASML NETHERLANDS B.V.
Jacobus Johannus Leonardus Hendricus VERSPAY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Immersion Liquid, Exposure Apparatus, and Exposure Process
Publication number
20090134488
Publication date
May 28, 2009
ASML NETHERLANDS B.V.
Hans Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY