Jacqueline Seto

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Processing information management system in a plasma processing tool
- Patent number 8,000,827
- Issue date Aug 16, 2011
- Lam Research Corporation
- Chad R. Weetman
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING INFORMATION MANAGEMENT SYSTEM IN A PLASMA PROCESSING TOOL
- Publication number 20100152879
- Publication date Jun 17, 2010
- Chad R. Weetman
- G05 - CONTROLLING REGULATING