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Jacques Cor Johan Van Der Donck
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Alphen aan den Rijn, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Particulate contamination measurement method and apparatus
Patent number
9,638,643
Issue date
May 2, 2017
ASML Netherlands B.V.
Antonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and contamination removal or prevention method
Patent number
9,599,908
Issue date
Mar 21, 2017
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of cleaning a surface of an immer...
Patent number
9,289,802
Issue date
Mar 22, 2016
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Lithographic apparatus and contamination removal or prevention method
Patent number
9,158,206
Issue date
Oct 13, 2015
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle cleaning of optical elements for microlithography
Patent number
8,477,285
Issue date
Jul 2, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND CONTAMINATION REMOVAL OR PREVENTION METHOD
Publication number
20160033875
Publication date
Feb 4, 2016
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Particulate Contamination Measurement Method and Apparatus
Publication number
20150055127
Publication date
Feb 26, 2015
ASML NETHERLANDS B.V.
Antonius Martinus Cornelis Petrus De Jong
B32 - LAYERED PRODUCTS
Information
Patent Application
Inspection method and apparatus using same
Publication number
20070258086
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G01 - MEASURING TESTING