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Jae Bum Yu
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Suwon City, KR
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last 30 patents
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Patent Grant
Process for etching tungsten silicide overlying polysilicon particu...
Patent number
7,754,610
Issue date
Jul 13, 2010
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Process for etching tungsten silicide overlying polysilicon particu...
Publication number
20070281477
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process including silo-chloro passivation for etching tungsten sili...
Publication number
20070281479
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS