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Jae Yong Cho
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Fishkill, NY, US
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last 30 patents
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Patent Grant
Heated electrostatic chuck and semiconductor wafer heater and metho...
Patent number
9,543,183
Issue date
Jan 10, 2017
FM Industries, Inc.
Jae Yong Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HEATED ELECTROSTATIC CHUCK AND SEMICONDUCTOR WAFER HEATER AND METHO...
Publication number
20140291311
Publication date
Oct 2, 2014
FM INDUSTRIES, INC.
Jae Yong Cho
H01 - BASIC ELECTRIC ELEMENTS