Membership
Tour
Register
Log in
Jaechul JUNG
Follow
Person
Seoul, KR
People
Overview
Industries
Organizations
People
Information
Impact
Patents Applications
last 30 patents
Information
Patent Application
PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD
Publication number
20170186586
Publication date
Jun 29, 2017
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER-SHAPED TOOL CONFIGURED TO MONITOR PLASMA CHARACTERISTICS AND...
Publication number
20150076328
Publication date
Mar 19, 2015
Jaechul JUNG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR