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JAEHOO LEE
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Seoul, KR
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last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
11,978,654
Issue date
May 7, 2024
Semes Co., Ltd.
Min Sung Han
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210125854
Publication date
Apr 29, 2021
SEMES CO. LTD.
MIN SUNG HAN
H01 - BASIC ELECTRIC ELEMENTS