Jaehwang Jung

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 12,228,499
- Issue date Feb 18, 2025
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor measurement apparatus
- Patent number 12,222,282
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Seoyeon Jeong
- G01 - MEASURING TESTING
Information Patent Grant
Metrology apparatus and method based on diffraction using oblique i...
- Patent number 12,002,698
- Issue date Jun 4, 2024
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging ellipsometry (IE)-based inspection method and method of fab...
- Patent number 11,972,960
- Issue date Apr 30, 2024
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-scale spectral imaging apparatuses and methods, and methods o...
- Patent number 11,726,046
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
- Patent number 11,624,699
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 11,604,136
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G02 - OPTICS
Information Patent Grant
Super-resolution holographic microscope
- Patent number 11,428,947
- Issue date Aug 30, 2022
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and method based on coherent diffraction imagi...
- Patent number 11,275,034
- Issue date Mar 15, 2022
- Samsung Electronics Co., Ltd.
- Kyungwon Yun
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection apparatus
- Patent number 11,264,256
- Issue date Mar 1, 2022
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
- Publication number 20230375463
- Publication date Nov 23, 2023
- Samsung Electronics Co., Ltd.
- Seoyeon JEONG
- G02 - OPTICS
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20230204493
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
- Publication number 20230186460
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Myungjun LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-SCALE SPECTRAL IMAGING APPARATUSES AND METHODS, AND METHODS O...
- Publication number 20220074867
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20220074848
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY APPARATUS AND METHOD BASED ON DIFFRACTION USING OBLIQUE I...
- Publication number 20220005715
- Publication date Jan 6, 2022
- Samsung Electronics Co., Ltd.
- Myungjun LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...
- Publication number 20210364420
- Publication date Nov 25, 2021
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND METHOD BASED ON COHERENT DIFFRACTION IMAGI...
- Publication number 20210164919
- Publication date Jun 3, 2021
- Samsung Electronics Co., Ltd.
- Kyungwon Yun
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION APPARATUS
- Publication number 20210082725
- Publication date Mar 18, 2021
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUPER-RESOLUTION HOLOGRAPHIC MICROSCOPE
- Publication number 20210080743
- Publication date Mar 18, 2021
- Samsung Electronics Co., Ltd.
- Myungjun LEE
- G02 - OPTICS
Information Patent Application
IMAGING ELLIPSOMETRY (IE)-BASED INSPECTION METHOD AND METHOD OF FAB...
- Publication number 20210028035
- Publication date Jan 28, 2021
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G01 - MEASURING TESTING

Jaehwang Jung

Person

Patents Grantslast 30 patents

Pupil ellipsometry measurement apparatus and method and method of f...

Semiconductor measurement apparatus

Metrology apparatus and method based on diffraction using oblique i...

Imaging ellipsometry (IE)-based inspection method and method of fab...

Multi-scale spectral imaging apparatuses and methods, and methods o...

Measurement system capable of adjusting AOI, AOI spread and azimuth...

Pupil ellipsometry measurement apparatus and method and method of f...

Super-resolution holographic microscope

Inspection apparatus and method based on coherent diffraction imagi...

Wafer inspection apparatus

Patents Applicationslast 30 patents

SEMICONDUCTOR MEASUREMENT APPARATUS

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

SEMICONDUCTOR MEASUREMENT APPARATUS

MULTI-SCALE SPECTRAL IMAGING APPARATUSES AND METHODS, AND METHODS O...

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

METROLOGY APPARATUS AND METHOD BASED ON DIFFRACTION USING OBLIQUE I...

MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...

INSPECTION APPARATUS AND METHOD BASED ON COHERENT DIFFRACTION IMAGI...

WAFER INSPECTION APPARATUS

SUPER-RESOLUTION HOLOGRAPHIC MICROSCOPE

IMAGING ELLIPSOMETRY (IE)-BASED INSPECTION METHOD AND METHOD OF FAB...