Jaehyuk Jang

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and apparatus
- Patent number 8,216,648
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Masanobu Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND APPARATUS
- Publication number 20110129619
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Masanobu Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...