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Hwaseong-si, KR
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last 30 patents
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Patent Grant
Supercritical fluid processing apparatus and substrate processing s...
Patent number
12,362,200
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Seohyun Kim
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUPERCRITICAL FLUID PROCESSING APPARATUS AND SUBSTRATE PROCESSING S...
Publication number
20230046595
Publication date
Feb 16, 2023
Samsung Electronics Co., Ltd.
Seohyun KIM
H01 - BASIC ELECTRIC ELEMENTS